MEMS mechanical sensors /
Annotation
| その他の著者: | |
|---|---|
| フォーマット: | Licensed eBooks |
| 言語: | 英語 |
| 出版事項: |
Boston :
Artech House,
©2004.
|
| シリーズ: | Microelectromechanical systems series.
|
| オンライン･アクセス: | https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=112165 |
目次:
- Machine generated contents note: Ch. 1 Introduction
- Ch. 2 Materials and fabrication techniques
- Ch. 3 MEMS simulation and design tools
- Ch. 4 Mechanical sensor packaging
- Ch. 5 Mechanical transduction techniques
- Ch. 6 Pressure sensors
- Ch. 7 Force and torque sensors
- Ch. 8 Inertial sensors
- Ch. 9 Flow sensors.