MEMS mechanical sensors /

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Detalles Bibliográficos
Outros autores: Beeby, Stephen
Formato: Licensed eBooks
Idioma:inglés
Publicado: Boston : Artech House, ©2004.
Series:Microelectromechanical systems series.
Acceso en liña:https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=112165