MEMS mechanical sensors /
Annotation
| Other Authors: | |
|---|---|
| Format: | Licensed eBooks |
| Language: | English |
| Published: |
Boston :
Artech House,
©2004.
|
| Series: | Microelectromechanical systems series.
|
| Online Access: | https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=112165 |
Table of Contents:
- Machine generated contents note: Ch. 1 Introduction
- Ch. 2 Materials and fabrication techniques
- Ch. 3 MEMS simulation and design tools
- Ch. 4 Mechanical sensor packaging
- Ch. 5 Mechanical transduction techniques
- Ch. 6 Pressure sensors
- Ch. 7 Force and torque sensors
- Ch. 8 Inertial sensors
- Ch. 9 Flow sensors.