Interconnection development for InP-HBT terahertz circuits - Stoppel, Dimitri (Göttingen : Cuvillier Verlag, 2020)
Intro -- 1. Introduction -- 2. InP HBT transferred-substrate process -- 3. Plasma etching of benzocyclobutene -- 4. Nickel chrome thin film resistors -- 5. Through silicon vias in atransferred-substrate process -- 6. Summary -- List of Figures -- List of Tables -- Bibliography -- Appendix A Publications -- Appendix B Acronyms
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Keywords: Terahertz technology; Printed circuits -- Design and construction; Technologie térahertz.; Printed circuits -- Design and construction; Terahertz technology; Electronic book