TY  - GEN
T1  - MEMS mechanical sensors
T2  - Microelectromechanical systems series.
A2  - Beeby, Stephen
LA  - English
PP  - Boston
PB  - Artech House
YR  - 2004
UL  - https://ebooks.jgu.edu.in/Record/ebsco_acadsubs_ocm55895606
AB  - Annotation
OP  - 269
CN  - TK7875 .M4537 2004eb
SN  - 1580538738
SN  - 9781580538732
SN  - 1580535364
SN  - 9781580535366
KW  - Microelectromechanical systems.
KW  - Detectors.
KW  - Microsystèmes électromécaniques.
KW  - TECHNOLOGY & ENGINEERING : Sensors.
KW  - Detectors
KW  - Microelectromechanical systems
ER  -